Products > Laser Optics (193nm-10.6um) > 248mn > f-Theta Scan Lens for Mask Imaging for Excimer @248nm
| Magnification | Efl (mm) | Working Distance (mm) | Scan Area (mm) | Scan Angle (degrees) | Max. Beam Diameter (mm) | Length (mm) | Max. Outside Diameter (mm) | Mounting Thread | Protective Window | Sill Part Number click for spec sheet |
| 0.33x | 221.10 | 303.60 | 200x200 | 14.00 | 10.00 | 38.60 | 88.0 | M85x1 | N | S4LFT4200/198 |
