Products > Laser Optics (193nm-10.6um) > 193nm > Standard f-Theta Scan Lens for Excimer
| Efl (mm) | Working Distance (mm) | Max. Beam Diameter (mm) | Scan Area (mm) | Scan Angle (degrees) | Aperture Stop (mm) | Length (mm) | Max. Outside Diameter (mm) | Mounting Thread | Protective Window | Sill Part Number click for spec sheet |
| 56.00 | 71.36 | 7.00 | 25x25 | 18.80 | 15.00 | 34.00 | 87.0 | M85x1 | Y | S4LFT4056/198 |
